diff --git a/homeassistant/components/zha/button.py b/homeassistant/components/zha/button.py
index e41e7a81e12..da14df0e2f7 100644
--- a/homeassistant/components/zha/button.py
+++ b/homeassistant/components/zha/button.py
@@ -4,8 +4,9 @@ from __future__ import annotations
 import abc
 import functools
 import logging
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 import zigpy.exceptions
 from zigpy.zcl.foundation import Status
 
@@ -27,8 +28,6 @@ if TYPE_CHECKING:
     from .core.device import ZHADevice
 
 
-_ZHAIdentifyButtonSelfT = TypeVar("_ZHAIdentifyButtonSelfT", bound="ZHAIdentifyButton")
-
 MULTI_MATCH = functools.partial(ZHA_ENTITIES.multipass_match, Platform.BUTTON)
 CONFIG_DIAGNOSTIC_MATCH = functools.partial(
     ZHA_ENTITIES.config_diagnostic_match, Platform.BUTTON
@@ -91,12 +90,12 @@ class ZHAIdentifyButton(ZHAButton):
 
     @classmethod
     def create_entity(
-        cls: type[_ZHAIdentifyButtonSelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _ZHAIdentifyButtonSelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
diff --git a/homeassistant/components/zha/core/channels/__init__.py b/homeassistant/components/zha/core/channels/__init__.py
index 7484b46256c..149b733be39 100644
--- a/homeassistant/components/zha/core/channels/__init__.py
+++ b/homeassistant/components/zha/core/channels/__init__.py
@@ -2,8 +2,9 @@
 from __future__ import annotations
 
 import asyncio
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 import zigpy.endpoint
 import zigpy.zcl.clusters.closures
 
@@ -36,8 +37,6 @@ if TYPE_CHECKING:
     from ...entity import ZhaEntity
     from ..device import ZHADevice
 
-_ChannelsSelfT = TypeVar("_ChannelsSelfT", bound="Channels")
-_ChannelPoolSelfT = TypeVar("_ChannelPoolSelfT", bound="ChannelPool")
 _ChannelsDictType = dict[str, base.ZigbeeChannel]
 
 
@@ -104,7 +103,7 @@ class Channels:
         }
 
     @classmethod
-    def new(cls: type[_ChannelsSelfT], zha_device: ZHADevice) -> _ChannelsSelfT:
+    def new(cls, zha_device: ZHADevice) -> Self:
         """Create new instance."""
         channels = cls(zha_device)
         for ep_id in sorted(zha_device.device.endpoints):
@@ -272,9 +271,7 @@ class ChannelPool:
         )
 
     @classmethod
-    def new(
-        cls: type[_ChannelPoolSelfT], channels: Channels, ep_id: int
-    ) -> _ChannelPoolSelfT:
+    def new(cls, channels: Channels, ep_id: int) -> Self:
         """Create new channels for an endpoint."""
         pool = cls(channels, ep_id)
         pool.add_all_channels()
diff --git a/homeassistant/components/zha/core/device.py b/homeassistant/components/zha/core/device.py
index dd8b3b9c2a7..17ec04fa9e8 100644
--- a/homeassistant/components/zha/core/device.py
+++ b/homeassistant/components/zha/core/device.py
@@ -9,8 +9,9 @@ from functools import cached_property
 import logging
 import random
 import time
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 from zigpy import types
 import zigpy.device
 import zigpy.exceptions
@@ -90,8 +91,6 @@ _LOGGER = logging.getLogger(__name__)
 _UPDATE_ALIVE_INTERVAL = (60, 90)
 _CHECKIN_GRACE_PERIODS = 2
 
-_ZHADeviceSelfT = TypeVar("_ZHADeviceSelfT", bound="ZHADevice")
-
 
 class DeviceStatus(Enum):
     """Status of a device."""
@@ -346,12 +345,12 @@ class ZHADevice(LogMixin):
 
     @classmethod
     def new(
-        cls: type[_ZHADeviceSelfT],
+        cls,
         hass: HomeAssistant,
         zigpy_dev: zigpy.device.Device,
         gateway: ZHAGateway,
         restored: bool = False,
-    ) -> _ZHADeviceSelfT:
+    ) -> Self:
         """Create new device."""
         zha_dev = cls(hass, zigpy_dev, gateway)
         zha_dev.channels = channels.Channels.new(zha_dev)
diff --git a/homeassistant/components/zha/entity.py b/homeassistant/components/zha/entity.py
index 065f2ce1572..8e0b58a8721 100644
--- a/homeassistant/components/zha/entity.py
+++ b/homeassistant/components/zha/entity.py
@@ -5,7 +5,9 @@ import asyncio
 from collections.abc import Callable
 import functools
 import logging
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
+
+from typing_extensions import Self
 
 from homeassistant.const import ATTR_NAME
 from homeassistant.core import CALLBACK_TYPE, Event, callback
@@ -35,9 +37,6 @@ if TYPE_CHECKING:
     from .core.channels.base import ZigbeeChannel
     from .core.device import ZHADevice
 
-_ZhaEntitySelfT = TypeVar("_ZhaEntitySelfT", bound="ZhaEntity")
-_ZhaGroupEntitySelfT = TypeVar("_ZhaGroupEntitySelfT", bound="ZhaGroupEntity")
-
 _LOGGER = logging.getLogger(__name__)
 
 ENTITY_SUFFIX = "entity_suffix"
@@ -181,12 +180,12 @@ class ZhaEntity(BaseZhaEntity, RestoreEntity):
 
     @classmethod
     def create_entity(
-        cls: type[_ZhaEntitySelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _ZhaEntitySelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
@@ -279,13 +278,13 @@ class ZhaGroupEntity(BaseZhaEntity):
 
     @classmethod
     def create_entity(
-        cls: type[_ZhaGroupEntitySelfT],
+        cls,
         entity_ids: list[str],
         unique_id: str,
         group_id: int,
         zha_device: ZHADevice,
         **kwargs: Any,
-    ) -> _ZhaGroupEntitySelfT | None:
+    ) -> Self | None:
         """Group Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
diff --git a/homeassistant/components/zha/number.py b/homeassistant/components/zha/number.py
index 63eb5892242..184a3d46515 100644
--- a/homeassistant/components/zha/number.py
+++ b/homeassistant/components/zha/number.py
@@ -3,8 +3,9 @@ from __future__ import annotations
 
 import functools
 import logging
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 import zigpy.exceptions
 from zigpy.zcl.foundation import Status
 
@@ -36,10 +37,6 @@ if TYPE_CHECKING:
 
 _LOGGER = logging.getLogger(__name__)
 
-_ZHANumberConfigurationEntitySelfT = TypeVar(
-    "_ZHANumberConfigurationEntitySelfT", bound="ZHANumberConfigurationEntity"
-)
-
 STRICT_MATCH = functools.partial(ZHA_ENTITIES.strict_match, Platform.NUMBER)
 CONFIG_DIAGNOSTIC_MATCH = functools.partial(
     ZHA_ENTITIES.config_diagnostic_match, Platform.NUMBER
@@ -383,12 +380,12 @@ class ZHANumberConfigurationEntity(ZhaEntity, NumberEntity):
 
     @classmethod
     def create_entity(
-        cls: type[_ZHANumberConfigurationEntitySelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _ZHANumberConfigurationEntitySelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
diff --git a/homeassistant/components/zha/select.py b/homeassistant/components/zha/select.py
index 295c61314c7..3f6b24282c9 100644
--- a/homeassistant/components/zha/select.py
+++ b/homeassistant/components/zha/select.py
@@ -4,8 +4,9 @@ from __future__ import annotations
 from enum import Enum
 import functools
 import logging
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 from zigpy import types
 from zigpy.zcl.clusters.general import OnOff
 from zigpy.zcl.clusters.security import IasWd
@@ -36,10 +37,6 @@ if TYPE_CHECKING:
     from .core.device import ZHADevice
 
 
-_ZCLEnumSelectEntitySelfT = TypeVar(
-    "_ZCLEnumSelectEntitySelfT", bound="ZCLEnumSelectEntity"
-)
-
 CONFIG_DIAGNOSTIC_MATCH = functools.partial(
     ZHA_ENTITIES.config_diagnostic_match, Platform.SELECT
 )
@@ -164,12 +161,12 @@ class ZCLEnumSelectEntity(ZhaEntity, SelectEntity):
 
     @classmethod
     def create_entity(
-        cls: type[_ZCLEnumSelectEntitySelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _ZCLEnumSelectEntitySelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
diff --git a/homeassistant/components/zha/sensor.py b/homeassistant/components/zha/sensor.py
index eb952d44610..b7dec5d61dc 100644
--- a/homeassistant/components/zha/sensor.py
+++ b/homeassistant/components/zha/sensor.py
@@ -4,8 +4,9 @@ from __future__ import annotations
 import enum
 import functools
 import numbers
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 from zigpy import types
 
 from homeassistant.components.climate import HVACAction
@@ -68,13 +69,6 @@ if TYPE_CHECKING:
     from .core.channels.base import ZigbeeChannel
     from .core.device import ZHADevice
 
-_SensorSelfT = TypeVar("_SensorSelfT", bound="Sensor")
-_BatterySelfT = TypeVar("_BatterySelfT", bound="Battery")
-_ThermostatHVACActionSelfT = TypeVar(
-    "_ThermostatHVACActionSelfT", bound="ThermostatHVACAction"
-)
-_RSSISensorSelfT = TypeVar("_RSSISensorSelfT", bound="RSSISensor")
-
 PARALLEL_UPDATES = 5
 
 BATTERY_SIZES = {
@@ -139,12 +133,12 @@ class Sensor(ZhaEntity, SensorEntity):
 
     @classmethod
     def create_entity(
-        cls: type[_SensorSelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _SensorSelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
@@ -209,12 +203,12 @@ class Battery(Sensor):
 
     @classmethod
     def create_entity(
-        cls: type[_BatterySelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _BatterySelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Unlike any other entity, PowerConfiguration cluster may not support
@@ -710,12 +704,12 @@ class ThermostatHVACAction(Sensor, id_suffix="hvac_action"):
 
     @classmethod
     def create_entity(
-        cls: type[_ThermostatHVACActionSelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _ThermostatHVACActionSelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
@@ -839,12 +833,12 @@ class RSSISensor(Sensor, id_suffix="rssi"):
 
     @classmethod
     def create_entity(
-        cls: type[_RSSISensorSelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _RSSISensorSelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None
diff --git a/homeassistant/components/zha/switch.py b/homeassistant/components/zha/switch.py
index f7a16c83b60..854c112d4bb 100644
--- a/homeassistant/components/zha/switch.py
+++ b/homeassistant/components/zha/switch.py
@@ -3,8 +3,9 @@ from __future__ import annotations
 
 import functools
 import logging
-from typing import TYPE_CHECKING, Any, TypeVar
+from typing import TYPE_CHECKING, Any
 
+from typing_extensions import Self
 import zigpy.exceptions
 from zigpy.zcl.clusters.general import OnOff
 from zigpy.zcl.foundation import Status
@@ -33,10 +34,6 @@ if TYPE_CHECKING:
     from .core.channels.base import ZigbeeChannel
     from .core.device import ZHADevice
 
-_ZHASwitchConfigurationEntitySelfT = TypeVar(
-    "_ZHASwitchConfigurationEntitySelfT", bound="ZHASwitchConfigurationEntity"
-)
-
 STRICT_MATCH = functools.partial(ZHA_ENTITIES.strict_match, Platform.SWITCH)
 GROUP_MATCH = functools.partial(ZHA_ENTITIES.group_match, Platform.SWITCH)
 CONFIG_DIAGNOSTIC_MATCH = functools.partial(
@@ -179,12 +176,12 @@ class ZHASwitchConfigurationEntity(ZhaEntity, SwitchEntity):
 
     @classmethod
     def create_entity(
-        cls: type[_ZHASwitchConfigurationEntitySelfT],
+        cls,
         unique_id: str,
         zha_device: ZHADevice,
         channels: list[ZigbeeChannel],
         **kwargs: Any,
-    ) -> _ZHASwitchConfigurationEntitySelfT | None:
+    ) -> Self | None:
         """Entity Factory.
 
         Return entity if it is a supported configuration, otherwise return None